ASML can operate advanced lithography machines remotely? Wu Cheng-Wen: Technically feasible

The Dutch government has reportedly banned ASML from selling Extreme Ultraviolet Lithography (EUV) machines to the Chinese Communist Party (CCP), with the ability to remotely shut down the EUV machines if CCP invades Taiwan. National Science Council Chairman Wu Cheng-Wen stated on Thursday (May 23) that with the current semiconductor industry’s smart manufacturing technology, this is achievable.

According to Bloomberg, several sources revealed that in the event of a Chinese invasion of Taiwan, Dutch semiconductor production equipment manufacturer ASML and Taiwan Semiconductor Manufacturing Company (TSMC) have a method to shut down TSMC’s world-leading chip manufacturing equipment, EUV, using extreme ultraviolet light lithography technology.

Bloomberg pointed out that ASML is the only company globally producing EUV machines, with each machine priced over 200 million euros. The Dutch government has long been regulating ASML technology to prevent it from falling into the wrong hands. For example, the Dutch government prohibits ASML from selling EUV machines to the CCP, as US authorities are concerned that if their adversary CCP obtains EUV technology, it could gain an advantage in the global chip war.

The Legislative Yuan’s Education and Culture Committee invited Wu Cheng-Wen to report on the business situation and answer questions. Kuomintang Legislator Yeh Yuan-Chih inquired about the accuracy of foreign media reports and whether EUV could be remotely shut down. Wu Cheng-Wen responded that with the current semiconductor industry’s smart manufacturing technology, “it can be done, technologically speaking.”

Furthermore, some legislators are concerned about the National Science Council’s strategies to prevent CCP infiltration, such as the previously proposed national list of core key technologies. Wu Cheng-Wen stated that the National Science Council has not changed its stance and will continue to prioritize Taiwan’s national development and security. Taiwan is a part of the free and democratic society and must adhere to relevant international norms, domestic policy laws, and regulations, while also assisting the academic community in compliance and fulfilling its advisory obligations.

(Translated from Central News Agency)